Dr. Albert K. Henning Profile

Dr. Albert K. Henning

Principal at Aquarian Microsystems

SPIE Involvement:

Conference Program Committee | Author

Proceedings Article | 9 March 2013 Paper

Piezoresistive pens for dip-pen nanolithography

A. Henning, J. Fragala, R. Shile, P. Simao

Proceedings Volume 8615, 861510 (2013) https://doi.org/10.1117/12.2008785

KEYWORDS: Silicon, Semiconducting wafers, Scanning probe lithography, Etching, Wafer bonding, Sensors, Oxides, Boron, Resistors, Microfabrication

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Proceedings Article | 9 March 2013 Paper

An all-at-once factorial method to optimize dip-pen deposition of liquid protein inks

A. Henning, S. Rozhok, J. Fragala, R. Shile, K. Ouyang

Proceedings Volume 8615, 861515 (2013) https://doi.org/10.1117/12.2004827

KEYWORDS: Proteins, Liquids, Capillaries, Printing, Silicon, Microfluidics, Throat, Scanning probe lithography, Oxides, Microfabrication

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Proceedings Article | 12 February 2008 Paper

Application concepts for complementary micropneumatic devices and circuits

Albert Henning

Proceedings Volume 6886, 68860F (2008) https://doi.org/10.1117/12.771200

KEYWORDS: Amplifiers, Microfluidics, Analog electronics, Protactinium, Data processing, Standards development, Digital electronics, Field effect transistors, Logic devices, Energy harvesting

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Proceedings Article | 22 January 2007 Paper

Concepts for micropneumatic and microhydraulic logic gates

Albert Henning

Proceedings Volume 6465, 64650T (2007) https://doi.org/10.1117/12.697807

KEYWORDS: Logic, Logic devices, Microfluidics, Oscillators, Liquids, Protactinium, Field effect transistors, Mathematical modeling, Switching, Gases

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Proceedings Article | 19 January 2007 Paper

On the reliability of thermopneumatic actuators with silicon membranes

Albert Henning

Proceedings Volume 6463, 64630K (2007) https://doi.org/10.1117/12.697818

KEYWORDS: Actuators, Silicon, Cavitation, Liquids, Microfluidics, Thermodynamics, Reliability, Temperature metrology, Gases, Microsystems

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Proceedings Article | 24 January 2004 Paper

Confirmation of large-periphery compressible gas flow model for microvalves

Albert Henning

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.532665

KEYWORDS: Data modeling, Instrument modeling, Systems modeling, Finite element methods, Gases, Manufacturing, Thermodynamics, Field effect transistors, Semiconductors, Process control

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Proceedings Article | 23 December 2003 Paper

Factors affecting silicon membrane burst strength

Albert Henning, Sapna Patel, Michael Selser, Bradford Cozad

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524648

KEYWORDS: Silicon, Surface roughness, Semiconducting wafers, Interfaces, Etching, Crystals, Wafer bonding, Wet etching, Micro raman spectroscopy, Reliability

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Proceedings Article | 16 January 2003 Paper

Long-term drift measurements in MEMS-based mass flow controllers

Elizabeth Lawrence, Albert Henning

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.498239

KEYWORDS: Sensors, Microsoft Foundation Class Library, Reliability, Silicon, Calibration, Microelectromechanical systems, Control systems, Sensor calibration, Resistors, Particles

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Proceedings Article | 18 August 2000 Paper

Practical aspects of micromachined gas distribution systems for semiconductor processing

Albert Henning, Brad Cozad, Elizabeth Lawrence, Errol Arkilic, James Harris

Proceedings Volume 4177, (2000) https://doi.org/10.1117/12.395668

KEYWORDS: Semiconductor manufacturing, Microsoft Foundation Class Library, Particles, Contamination, Microfluidics

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Proceedings Article | 11 August 2000 Paper

Compact pressure- and structure-based gas flow model for microvalves

Albert Henning

Proceedings Volume 4175, (2000) https://doi.org/10.1117/12.395614

KEYWORDS: Systems modeling, Microfluidics, Cadmium, System integration, Data modeling, Field effect transistors, Microelectronics, Silicon, Control systems, Motion models

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Proceedings Article | 10 September 1998 Paper

Liquid and gas-liquid phase behavior in thermopneumatically actuated microvalves

Albert Henning

Proceedings Volume 3515, (1998) https://doi.org/10.1117/12.322096

KEYWORDS: Liquids, Microfluidics, Control systems, Thermodynamics

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Proceedings Article | 8 September 1998 Paper

Performance of MEMS-based gas distribution and control systems for semiconductor processing

Albert Henning, John Fitch, James Harris, Errol Arkilic, Brad Cozad, Ben Dehan

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323883

KEYWORDS: Microsoft Foundation Class Library, Control systems, Liquids, Silicon, Sensors, Semiconductor manufacturing, Microfluidics, Systems modeling, Reliability, Resistance

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Proceedings Article | 1 September 1998 Paper

Effects of semiconductor surface band pinning on scanning electrostatic force microscopy

Albert Henning

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324059

KEYWORDS: Semiconductors, Doping, Microscopy, Scanning probe microscopy, Sensors, Microfabrication, Silicon, Metals, Nonlinear optics, P-type semiconductors

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Proceedings Article | 26 September 1995 Paper

Effects of doping on the dynamic mechanical response of semiconductor cantilevers to electrostatic forces

Albert Henning

Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222652

KEYWORDS: Semiconductors, Capacitors, Iron, Metals, Atomic force microscopy, Doping, Electrodes, Microscopes, Polonium, Microfabrication

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Proceedings Article | 19 September 1995 Paper

Out-of-plane microstructures using stress engineering of thin films

Chia-Lun Tsai, Albert Henning

Proceedings Volume 2639, (1995) https://doi.org/10.1117/12.221297

KEYWORDS: Silicon, Thin films, Silicon films, Scanning electron microscopy, Low pressure chemical vapor deposition, Composites, 3D microstructuring, Microelectromechanical systems, Etching, Semiconducting wafers

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Proceedings Article | 15 September 1995 Paper

Microfabricated sensors for the measurement of electromagnetic fields in biological tissues

James Monberg, Albert Henning

Proceedings Volume 2642, (1995) https://doi.org/10.1117/12.221162

KEYWORDS: Magnetism, Tissues, Sensors, In vivo imaging, Microfabrication, Electromagnetism, In vitro testing, Calibration, Magnesium, Cancer

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Showing 5 of 16 publications

SPIE Conference Volume | 22 February 2008

MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface

SPIE Conference Volume | 8 February 2007

MEMS/MOEMS Components and Their Applications IV

SPIE Conference Volume | 21 January 2006

MEMS/MOEMS Components and Their Applications III

SPIE Conference Volume | 22 January 2005

MEMS/MOEMS Components and Their Applications II

SPIE Conference Volume | 24 January 2004

MEMS/MOEMS Components and Their Applications

Conference Committee Involvement (38)

Microfluidics, BioMEMS, and Medical Microsystems XXII

28 January 2024 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XXI

29 January 2023 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XX

22 January 2022 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XIX

6 March 2021 | Online Only, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XVIII

1 February 2020 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XVII

2 February 2019 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XVI

27 January 2018 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XV

28 January 2017 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XIV

13 February 2016 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XIII

7 February 2015 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

3 February 2014 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XII

2 February 2014 | San Francisco, California, United States

SPIE MOEMS-MEMS

1 February 2014 | San Francisco, United States

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

4 February 2013 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems XI

3 February 2013 | San Francisco, California, United States

SPIE MOEMS-MEMS

2 February 2013 | San Francisco, United States

Microfluidics, BioMEMS, and Medical Microsystems X

23 January 2012 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI

23 January 2012 | San Francisco, California, United States

SPIE MOEMS-MEMS

21 January 2012 | San Francisco, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

24 January 2011 | San Francisco, California, United States

Microfluidics, BioMEMS, and Medical Microsystems IX

23 January 2011 | San Francisco, California, United States

SPIE MOEMS-MEMS

22 January 2011 | San Francisco, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX

25 January 2010 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII

28 January 2009 | San Jose, California, United States

SPIE MOEMS-MEMS: Micro- and Nanofabrication

24 January 2009 | San Jose, United States

MEMS/MOEMS Components and Their Applications V Special Focus Topics: Transducers at the Micro-Nano Interface

21 January 2008 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII

21 January 2008 | San Jose, California, United States

MOEMS-MEMS 2008 Micro and Nanofabrication

19 January 2008 | San Jose, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

23 January 2007 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications IV Special Focus Topics: Transducers at the Micro-Nano Interface

22 January 2007 | San Jose, California, United States

MOEMS-MEMS 2007 Micro and Nanofabrication

20 January 2007 | San Jose, United States

MEMS/MOEMS Components and Their Applications III

23 January 2006 | San Jose, California, United States

MOEMS-MEMS 2006 Micro and Nanofabrication

21 January 2006 | San Jose, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications II

24 January 2005 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications

26 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS II

27 January 2003 | San Jose, CA, United States

Showing 5 of 38 Conference Committees

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