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Alexander Postnikov
at Institute of Physics and Technology
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Publications (1)
Proceedings Article | 8 January 2013 Paper
The mode matching technology for MEMS gyroscopes with mutually spaced eigenfrequencies
O. Morozov, A. Postnikov, I. Kozin, A. Soloviev, A. Tarasov
Proceedings Volume 8700, 87000T (2013) https://doi.org/10.1117/12.2016784
KEYWORDS: Etching, Semiconducting wafers, Gyroscopes, Deep reactive ion etching, Silicon, Silica, Microelectromechanical systems, Finite element methods, Photomasks, Oxidation
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