Dr. Alexandru Andrei Profile

Dr. Alexandru Andrei

at Univ de Franche-Comté

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Author

Publications (6)

Proceedings Article | 11 August 2008 Paper

Twymann Green interferometry in study of AlN material as an actuation layer in MEMS

C. Gorecki, K. Krupa, A. Andrei, M. Jozwik, L. Nieradko, P. Delobelle, L. Hirsinger

Proceedings Volume 7064, 706402 (2008) https://doi.org/10.1117/12.796072

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Microelectromechanical systems, Silicon, Electrodes, Thin films, Actuators, Scanning electron microscopy, Multilayers

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Proceedings Article | 25 April 2008 Paper

Characterization of MEMS cantilevers using lensless digital holographic microscope

Vijay Raj Singh, Alexandru Andrei, Christophe Gorecki, Lukasz Nieradko, Anand Asundi

Proceedings Volume 6995, 69950F (2008) https://doi.org/10.1117/12.782981

KEYWORDS: Digital holography, 3D image reconstruction, Holography, Holograms, Microscopes, Microelectromechanical systems, Aluminum nitride, Beam splitters, Vibrometry, Charge-coupled devices

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Proceedings Article | 25 April 2008 Paper

AlN driven microcantilever actuators: modeling, fabrication, characterization

K. Krupa, M. Józwik, A. Andrei, Ł. Nieradko, C. Gorecki, P. Delobelle, L. Hirsinger

Proceedings Volume 6995, 69950E (2008) https://doi.org/10.1117/12.781262

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Silicon, Actuators, Microelectromechanical systems, Electrodes, Multilayers, Thin films, Silicon films

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Proceedings Article | 14 August 2006 Paper

Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

C. Gorecki, A. Andrei, M. Jozwik, K. Krupa, K. Dogheche, S. Balandras, L. Hirsinger, P. Delobelle

Proceedings Volume 6293, 629308 (2006) https://doi.org/10.1117/12.680691

KEYWORDS: Aluminum nitride, Microelectromechanical systems, Interferometry, Thin films, Transducers, Acoustics, Microactuators, Actuators, Ultrasonics, Silicon

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Proceedings Article | 9 May 2006 Paper

Reliability studies of micro-optical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, M. Kujawinska

Proceedings Volume 6193, 61930A (2006) https://doi.org/10.1117/12.662001

KEYWORDS: Refractive index, Reliability, Aluminum nitride, Metals, Optical fibers, Microelectromechanical systems, Tomography, Micro optics, Gold, Glasses

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Proceedings Article | 28 April 2006 Paper

Fabrication, characterization, and reliability study of AlN-driven cantilevers

A. Andrei, K. Krupa, M. Jozwik, L. Nieradko, C. Gorecki, L. Hirsinger, P. Delobelle

Proceedings Volume 6188, 61880S (2006) https://doi.org/10.1117/12.663526

KEYWORDS: Aluminum nitride, Metals, Reliability, Interferometry, Etching, Reactive ion etching, Microelectromechanical systems, Aluminum, Electrodes, Silicon

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Showing 5 of 6 publications

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