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Aner Avakrat
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Publications (1)
Proceedings Article | 7 May 2019 Presentation + Paper
SEM inspection and review method for addressing EUV stochastic defects
Proceedings Volume 10959, 109591S (2019) https://doi.org/10.1117/12.2514877
KEYWORDS: Stochastic processes, Metrology, Inspection, Scanning electron microscopy, Critical dimension metrology, Extreme ultraviolet, Error analysis, Defect inspection, Defect detection, Lithography
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