Dr. Conrad Wolke Profile

Dr. Conrad Wolke

at Carl Zeiss SMT GmbH

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Publications (2)

Proceedings Article | 19 March 2018 Paper

Aerial image based metrology of EUV masks: recent achievements, status, and outlook for the AIMS EUV platform

Renzo Capelli, Dirk Hellweg, Martin Dietzel, Markus Koch, Conrad Wolke, Grizelda Kersteen

Proceedings Volume 10583, 1058311 (2018) https://doi.org/10.1117/12.2297681

KEYWORDS: Extreme ultraviolet, Photomasks, Line width roughness, Extreme ultraviolet lithography, Stochastic processes, Scanners, Semiconducting wafers, Image processing, Scanning electron microscopy, Metrology

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Proceedings Article | 16 October 2017 Paper

Actinic review of EUV masks: challenges and achievements in delivering the perfect mask for EUV production

Dirk Hellweg, Martin Dietzel, Renzo Capelli, Conrad Wolke, Grizelda Kersteen, Markus Koch, Ralf Gehrke

Proceedings Volume 10451, 104510J (2017) https://doi.org/10.1117/12.2280689

KEYWORDS: Photomasks, Extreme ultraviolet, Semiconducting wafers, Stochastic processes, Extreme ultraviolet lithography, Scanners, 3D metrology, Line width roughness, Manufacturing, Lithography

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