Dr. Dakota Seal Profile

Dr. Dakota Seal

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 August 2024 Paper

Curvilinear mask metrology: What’s the 2D equivalent of CD?

Linyong (Leo) Pang, Dakota Seal, Tom Boettiger, Nagesh Shirali, Grace Dai, Aki Fujimura

Proceedings Volume 13177, 131770C (2024) https://doi.org/10.1117/12.3033233

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, SRAF, Optical proximity correction, Metrology, Lithography, Line edge roughness, Photomasks, Design

Read Abstract +

SPIE Journal Paper | 27 June 2024

Curvilinear mask metrology: what is the equivalent critical dimension?

Linyong (Leo) Pang, Dakota Seal, Tom Boettiger, Nagesh Shirali, Grace Dai, Aki Fujimura

JM3, Vol. 23, Issue 02, 021304, (June 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.2.021304

KEYWORDS: Critical dimension metrology, Metrology, Semiconducting wafers, Scanning electron microscopy, Optical proximity correction, Optical alignment, Lithography, SRAF, Photomasks, Contour extraction

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years