Dr. Darren A. Alman
at Univ of Illinois
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 18 January 2007 Paper
Proceedings Volume 6151, 61513O (2007) https://doi.org/10.1117/12.656639
KEYWORDS: Contamination, Tin, Ruthenium, Mirrors, Extreme ultraviolet lithography, Gold, Molybdenum, Sputter deposition, Silicon, Ions

SPIE Journal Paper | 1 January 2007
JM3, Vol. 6, Issue 01, 013006, (January 2007) https://doi.org/10.1117/12.10.1117/1.2437212
KEYWORDS: Ions, Molybdenum, Mirrors, Gold, Silicon, Extreme ultraviolet, Ruthenium, Extreme ultraviolet lithography, Multilayers, Sputter deposition

SPIE Journal Paper | 1 July 2006
JM3, Vol. 5, Issue 03, 033007, (July 2006) https://doi.org/10.1117/12.10.1117/1.2358124
KEYWORDS: Contamination, Molybdenum, Tin, Mirrors, Reflectivity, Gold, Sputter deposition, Ions, Ruthenium, Plasma

SPIE Journal Paper | 1 July 2006
JM3, Vol. 5, Issue 03, 033006, (July 2006) https://doi.org/10.1117/12.10.1117/1.2243082
KEYWORDS: Molybdenum, Silicon, Ions, Gold, Xenon, Plasma, Ruthenium, Palladium, Mirrors, Extreme ultraviolet lithography

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6151, 615146 (2006) https://doi.org/10.1117/12.657401
KEYWORDS: Plasmas, Ions, Xenon, Extreme ultraviolet, Electrons, Hydrogen, Extreme ultraviolet lithography, Prisms, Diagnostics, Lithography

Proceedings Article | 6 May 2005 Paper
M. Neumann, H. Shin, H. Qiu, E. Ritz, R. DeFrees, M. Hendricks, D. Alman, B. Jurczyk, D. Ruzic, R. Bristol
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600117
KEYWORDS: Lithium, Tin, Etching, Mirrors, Plasma, Diffusion, Silicon, Ions, Chlorine, Atomic force microscopy

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599978
KEYWORDS: Photodiodes, Mirrors, Extreme ultraviolet lithography, Extreme ultraviolet, Electrodes, Reflectivity, Atomic force microscopy, Scanning electron microscopy, Ions, Xenon

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598543
KEYWORDS: Plasma, Ions, Extreme ultraviolet, Black bodies, Copper, X-rays, Xenon, Tin, X-ray microscopy, Laser energy

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599799
KEYWORDS: Ions, Xenon, Mirrors, Extreme ultraviolet, Photodiodes, Diagnostics, Sensors, Plasma, Reflectivity, Iron

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600048
KEYWORDS: Ions, Plasma, Tin, Extreme ultraviolet, Mirrors, Gold, EUV optics, Metals, Etching, Molybdenum

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600093
KEYWORDS: Molybdenum, Silicon, Ruthenium, Gold, Ions, Xenon, Palladium, Extreme ultraviolet lithography, Atomic force microscopy, Crystals

Showing 5 of 11 publications
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