Dhairya Singh Arya
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 5 June 2015
Mahanth Prasad, Dhairya Singh Arya, Vinod Kumar Khanna
JM3, Vol. 14, Issue 02, 025003, (June 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.2.025003
KEYWORDS: Platinum, Reliability, Resistance, Microelectromechanical systems, Temperature metrology, Silicon, Nickel, Tungsten, Resistors, Oxides

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