Dr. Eric Lanzendorf Profile

Dr. Eric Lanzendorf

Staff Engineer at Intel Corp

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Publications (2)

Proceedings Article | 20 May 2006 Paper

EUV mask process development and integration

Guojing Zhang, Pei-Yang Yan, Ted Liang, Yan Du, Peter Sanchez, Seh-jin Park, Eric Lanzendorf, Chang Ju Choi, Emily Shu, Alan Stivers, Jeff Farnsworth, Kangmin Hsia, Manish Chandhok, Michael Leeson, Gilroy Vandentop

Proceedings Volume 6283, 62830G (2006) https://doi.org/10.1117/12.681839

KEYWORDS: Photomasks, Extreme ultraviolet, Etching, Reflectivity, Defect inspection, Extreme ultraviolet lithography, Inspection, Ruthenium, Image processing, Optical lithography

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Proceedings Article | 25 September 1995 Paper

Photoinduced ejection of thermal and ballistic fragments from N20/Pt(111) and NH3/Pt(111)

Denis Masson, Eric Lanzendorf, Andrew Kummel

Proceedings Volume 2547, (1995) https://doi.org/10.1117/12.221477

KEYWORDS: Ions, Chemical species, Laser beam diagnostics, Molecules, Oxygen, Photolysis, Polarization, Electrons, Platinum, Sensors

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