Resonant cavity-enhanced photodetectors (RCE PDs) present a compelling alternative to broadband detection techniques in the field of gas detection and environmental sensing, due to the distinctive narrow-band absorption fingerprints of gases such as N2O (at 4.5 μm) or CO (4.6 μm). This characteristic aligns well with the operational mode of an RCE PD, whose VCSEL-like architecture results in a tuneable narrow-band spectral response with a significantly enhanced quantum efficiency. Additionally, unlike broadband detectors, RCE PDs are not subject to the broadband BLIP limit due to their high spectral selectivity, while the substantially reduced absorber volume offers commensurately reduced Auger and generation-recombination dark current densities. In this work, we present efforts to extend the operability of these structures beyond 4.0 μm wavelength by employing the type-II InAs/InAsSb superlattice as the absorber material. The tuneable bandgap of this structure allows to achieve and demonstrate a MWIR RCE PD with a highly thermally stable resonant response at ~ 4.45 μm, a Q factor of 85-95, full-width-at-half-maximum of ~ 50 nm and a peak quantum efficiency of 84% at 240 K - features which are promising for detection of gases such as CO and N2O. The broadband BLIP is also achieved at 180 K, a result which could potentially enable thermoelectrically cooled operation in the future. Finally, thanks to the inherent bandgap tunability of the InAs/InAsSb superlattice, extension of resonant response into the LWIR range is achievable with relatively straightforward changes to the already existing RCE PD structure.
Inserting an infrared detector architecture into an optical cavity between two high-reflectivity mirrors allows incident light to reflect and pass through the detector multiple times, thereby enhancing absorption within the active region. This allows for a 40-100x thinner optical absorbing region compared to conventional infrared detector structures which reduces the detector dark current and noise and enhances SNR. We report the design, growth, fabrication and characterization of resonant cavity enhanced MWIR photodiodes on GaSb substrates. Devices on GaSb use AlAsSb/GaSb mirrors, AlAsSb spacer layers, and a narrow 96 nm InAsSb absorber. Dark current and detectivity behavior better than equivalent broadband nBn detectors in the literature have been observed. 34nm linewidth detector response is observed. Resonant cavity-enhanced photodiodes with resonant wavelengths of 3.6μm and 3.72μm are demonstrated with dark currents equal to or lower than Rule 07 over the operating temperature range of the device. D* in excess of 1×1010 cm Hz1/2W-1 at 300K and 8×1010 cm Hz1/2W-1 at 250K have been achieved. Amethyst Research has produced packaged resonant-cavity detectors. The 3.6 μm resonant-cavity enhanced photodiode was packaged within an Amethyst Research designed pre-amplifier package with an integrated TEC for detector cooling.
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