Dr. Dongfeng Geng Profile

Dr. Dongfeng Geng

at Luoyang Optoelectro Technology Development Ctr

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Author

Publications (2)

Proceedings Article | 20 November 2014 Paper

Study on inductively coupled plasma etching induced damage of InSb

Liwen Wang, Junjie Si, Guodong Zhang, Caijing Cheng, Dongfeng Geng

Proceedings Volume 9300, 93001F (2014) https://doi.org/10.1117/12.2071936

KEYWORDS: Etching, Capacitance, Semiconductors, Wet etching, Sensors, Plasma etching, Anisotropic etching, Infrared sensors, Capacitors, Metals

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Proceedings Article | 20 November 2014 Paper

Fracture analysis of InSb focal plane arrays chip under thermal shock

Dongfeng Geng, Kelin Zheng, Yingjie He

Proceedings Volume 9300, 93002I (2014) https://doi.org/10.1117/12.2073417

KEYWORDS: Staring arrays, Readout integrated circuits, Silicon, Indium, Semiconducting wafers, Particles, Chemical mechanical planarization, Surface finishing, Array processing, Failure analysis

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