Mr. Hiroshi Tsukada Profile

Hiroshi Tsukada

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Non-destructive investigation for metal structure in 3D flash memory by an ultra-high resolution x-ray microscope

K. Omote, R. Hirose, H. Tsukada, A. Hamaguchi, Y. Yoshitake, K. Yoshino

Proceedings Volume 12955, 129551B (2024) https://doi.org/10.1117/12.3010113

KEYWORDS: X-rays, Microscopes, Metals, X-ray imaging, Reflection, Mirrors, Multilayers, Transmittance, Silicon, Nondestructive evaluation

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Proceedings Article | 22 February 2021 Presentation + Paper

Measurability analysis of the HAR structure in 3D memory by T-SAXS simulation

Kaori Sasaki, Takaki Hashimoto, Yenting Kuo, Hiroshi Tsukada, Hiroyuki Tanizaki

Proceedings Volume 11611, 116110U (2021) https://doi.org/10.1117/12.2582070

KEYWORDS: X-rays, 3D metrology, X-ray imaging, Scattering, Process control, Nondestructive evaluation, 3D modeling, X-ray diffraction, Shape analysis, Semiconductors

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