Ms. Hong Wang Profile

Hong Wang

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Proceedings Article | 11 October 2024 Paper

Fast convergence of shapes using atmospheric inductively coupled plasma

Peiqi Jiao, Bin Fan, Qiang Xin, Xiang Wu, Yujuan Zhang, Hong Wang

Proceedings Volume 13278, 132780B (2024) https://doi.org/10.1117/12.3032179

KEYWORDS: Plasma, Atmospheric plasma, Etching, Optics manufacturing, Atmospheric optics, Optical surfaces

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Plasma machining technology is an advanced optical manufacturing technology developed in recent years, which can quickly mitigate or remove surface/subsurface damage caused by conventional optical machining methods, as well as the advantages of efficient, high-precision and high-resolution trimming of optical surface shapes. In this paper, based on atmospheric inductively coupled plasma (ICP), we analyze the effects of changes in reactive gas flow, power, and residence time on the removal function during processing, as well as experiments on the long-time stability of the plasma jet. Finally, selected appropriate machining parameters and performed trimming machining on the element to make the surface shape converge quickly and reduce the low-frequency error of the shape.

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