Dr. Jeong-Hoon Lee Profile

Dr. Jeong-Hoon Lee

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Publications (1)

Proceedings Article | 14 February 2015 Paper

Feature extraction of probe mark image and automatic detection of probing pad defects in semiconductor using CSVM

Jeong-Hoon Lee, Jee-Hyong Lee

Proceedings Volume 9445, 94450H (2015) https://doi.org/10.1117/12.2181518

KEYWORDS: Semiconducting wafers, Phase modulation, Image processing, Defect detection, Feature extraction, Semiconductors, Systems engineering, Data modeling, Microfabrication, Microscopes

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