Jiamu Jin
at A*STAR
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2024 Presentation + Paper
Proceedings Volume 12887, 128870E (2024) https://doi.org/10.1117/12.3001995
KEYWORDS: Refractive index, Cladding, Plasma enhanced chemical vapor deposition, Coating stress, Silica, Low pressure chemical vapor deposition, Surface roughness, Waveguides, Semiconducting wafers, Photonic devices

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