Dr. Kedar Patel Profile

Dr. Kedar Patel

CEO

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Publications (2)

Proceedings Article | 13 March 2010 Paper

Comparative study of line width roughness (LWR) in next-generation lithography (NGL) processes

Kedar Patel, Thomas Wallow, Harry Levinson, Costas Spanos

Proceedings Volume 7640, 76400T (2010) https://doi.org/10.1117/12.848183

KEYWORDS: Line width roughness, Lithography, Extreme ultraviolet, Etching, Scanning electron microscopy, Nanoimprint lithography, Line edge roughness, Image processing, Photoresist processing, Directed self assembly

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Proceedings Article | 19 March 2008 Paper

Impact of gate line edge roughness on double-gate FinFET performance variability

Kedar Patel, Tsu-Jae King Liu, Costas Spanos

Proceedings Volume 6925, 69251I (2008) https://doi.org/10.1117/12.773065

KEYWORDS: Line edge roughness, Electrodes, Line width roughness, Critical dimension metrology, Monte Carlo methods, Field effect transistors, Transistors, Device simulation, Doping

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