Mr. Kevin M. Makles Profile

Kevin M. Makles

at Nearfield Instruments BV

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Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper

Subsurface scanning probe metrology for overlay through opaque layers

I. Battisti, K. Makles, M. S. Mucientes, Y. Guo, E. Simons, J. Bogdanowicz, A. Moussa, V. Blanco, F. Yasin, D. Crotti, A.-L. Charley, P. Leray, M. van Reijzen, C. Bozdog, H. Sadeghian

Proceedings Volume 12053, 1205310 (2022) https://doi.org/10.1117/12.2616093

KEYWORDS: Overlay metrology, Semiconducting wafers, Opacity, Atomic force microscopy, Scanning probe metrology, Image resolution, Pixel resolution, Photomasks

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