Mr. Kiyohiko Sato Profile

Kiyohiko Sato

at Hitachi High-Tech Corp.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

Yoshihide Yamaguchi, Sumiko Fujisaki, Kazunori Shinoda, Hiroyuki Kobayashi, Kiyohiko Sato, Kohei Kawamura, Kenji Maeda, Masaru Izawa

Proceedings Volume 12056, 1205602 (2022) https://doi.org/10.1117/12.2614198

KEYWORDS: Semiconductor process technologies, Isotropic etching, Dry etching, Vapor etching, Etching, Lanthanum, Cobalt, Adsorption

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases