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Kun Jiang
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Publications (2)
Proceedings Article | 12 December 2024 Paper
Research on nanoscale grid pitch characterization method based on metrological atomic force microscopy
Chong Yue, Yueqing Ding, Zhen Wu, Lei Tao, Yingqian Ni, Kun Jiang
Proceedings Volume 13446, 134461D (2024) https://doi.org/10.1117/12.3054245
KEYWORDS: Atomic force microscopy, Metrology, Interferometers, Atomic force microscope, Algorithm development, Raster graphics, Reliability, MATLAB, Inspection, Semiconductors
Proceedings Article | 11 October 2024 Paper
Study on the intelligent valuation technique of step height standards based on atomic force microscopy
Proceedings Volume 13278, 132780U (2024) https://doi.org/10.1117/12.3032361
KEYWORDS: Atomic force microscopy, Standards development, Histograms, Calibration, Metrology, Equipment, Atomic force microscope, Inspection, Semiconductors, Measurement devices
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