Maciej Szypulski
at Lublin Univ of Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 October 2018 Paper
M. Szypulski, D. Zarzeczny, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, T. Małecka-Massalska
Proceedings Volume 10808, 108085N (2018) https://doi.org/10.1117/12.2501736
KEYWORDS: Electrodes, Capacitors, Copper, Sputter deposition, Resistance, In vitro testing, Sensing systems, Gold, Computer aided design, Optical lithography

Proceedings Article | 1 October 2018 Paper
Proceedings Volume 10808, 1080859 (2018) https://doi.org/10.1117/12.2501556
KEYWORDS: Electrodes, Silicon, Resistance, Modeling and simulation, 3D modeling, Thermal modeling, In vitro testing, Titanium, Dielectrics, Structural design

Proceedings Article | 1 October 2018 Paper
D. Zarzeczny, M. Szypulski, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, T. Małecka-Massalska
Proceedings Volume 10808, 1080857 (2018) https://doi.org/10.1117/12.2501551
KEYWORDS: Titanium, Electrodes, Resistance, Capacitors, Optical lithography, Microelectromechanical systems, Sputter deposition, Analytical research, Design for manufacturability

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