CONFERENCE PROCEEDINGS
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Massimiliano Merli
at STMicroelectronics
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 2 March 2022 Presentation + Paper
Piezoelectric MEMS mirrors for the next generation of small form factor AR glasses
N. Boni, R. Carminati, G. Mendicino, M. Merli, D. Terzi, B. Lazarova, Matteo Fusi
Proceedings Volume 12013, 1201305 (2022) https://doi.org/10.1117/12.2609863
KEYWORDS: Mirrors, Microelectromechanical systems, Ferroelectric materials, Sensors, Glasses, Augmented reality, Reflectivity, Actuators, Silicon, Video acceleration
Proceedings Article | 2 March 2022 Poster + Presentation + Paper
Modeling and experimental validation of hysteretic scan behavior of quasi-static piezoelectric micromirror
M. Merli, G. Mendicino, R. Carminati, N. Boni
Proceedings Volume 12013, 120130J (2022) https://doi.org/10.1117/12.2608531
KEYWORDS: Ferroelectric materials, Polarization, Actuators, Microelectromechanical systems, Mirrors, Data modeling, Micromirrors, Capacitors, Piezoelectric thin film actuators, Modeling and simulation
Proceedings Article | 5 March 2021 Poster + Presentation + Paper
Electro-mechanical validation of a resonant MEMS mirror with PZT actuation and PZR sensing
G. Mendicino, M. Merli, R. Carminati, N. Boni, A. Opreni, A. Frangi
Proceedings Volume 11697, 1169715 (2021) https://doi.org/10.1117/12.2576877
KEYWORDS: Mirrors, Microelectromechanical systems, Ferroelectric materials, Sensors, Data modeling, Wheatstone bridges, System integration, Projection systems, Piezoresistive sensors, Optical testing
Proceedings Article | 5 March 2021 Presentation + Paper
Quasi-static PZT actuated MEMS mirror with 4x3mm2 reflective area and high robustness
N. Boni, R. Carminati, G. Mendicino, M. Merli
Proceedings Volume 11697, 1169708 (2021) https://doi.org/10.1117/12.2576526
KEYWORDS: Mirrors, Microelectromechanical systems, Reflectivity, Ferroelectric materials, Wheatstone bridges, Visible radiation, Thin films, Thin film devices, Scanners
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