Dr. Michael Tanksalvala
Researcher at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 4 October 2024 Presentation + Paper
M. Tanksalvala, Anthony Kos, Jacob Wisser, Scott Diddams, Hans Nembach, Justin Shaw
Proceedings Volume 13119, 131190E (2024) https://doi.org/10.1117/12.3027829
KEYWORDS: Extreme ultraviolet, Microwave radiation, Magnetism, Ferromagnetics, Equipment, X-rays, Spectroscopes, Nickel, Spectroscopy, Oscilloscopes

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295513 (2024) https://doi.org/10.1117/12.3009911
KEYWORDS: Extreme ultraviolet, Polymers, Diffraction, Scatterometry, Reflectometry, Metamaterials, Scanning transmission electron microscopy, Biological samples, Charge-coupled devices, Statistical modeling

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12496, 124960A (2023) https://doi.org/10.1117/12.2670528
KEYWORDS: Metrology, Light sources, Extreme ultraviolet, Photomasks, Illumination engineering, Diffraction, Signal processing, Phase shift keying, Light sources and illumination, Beam divergence

Proceedings Article | 27 April 2023 Presentation + Paper
Yuka Esashi, Nicholas Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua Knobloch, Henry Kapteyn, Margaret Murnane
Proceedings Volume 12496, 1249614 (2023) https://doi.org/10.1117/12.2658543
KEYWORDS: Reflectometry, Extreme ultraviolet, Nanostructures, Diffraction, Surface roughness, Metrology, Phase retrieval, High harmonic generation, Chemical composition

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726
KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC1205306 (2022) https://doi.org/10.1117/12.2612098
KEYWORDS: Reflectometry, Extreme ultraviolet, Beam splitters, Tolerancing, Silicon, Semiconductors, Metrology, Cameras, CCD image sensors, CCD cameras

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110L (2021) https://doi.org/10.1117/12.2584728
KEYWORDS: Scatterometry, Defect inspection, Metrology, Model-based design, Defect detection, Cameras, Signal to noise ratio, Sensors, Extreme ultraviolet, X-rays

Proceedings Article | 26 March 2019 Presentation
Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827
KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

Proceedings Article | 26 March 2019 Presentation
Proceedings Volume 10959, 109590W (2019) https://doi.org/10.1117/12.2517026
KEYWORDS: Nanoimaging, Extreme ultraviolet

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464
KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105852O (2018) https://doi.org/10.1117/12.2307861
KEYWORDS: Coherence imaging, Extreme ultraviolet, Extreme ultraviolet lithography, Pellicles, Photomasks, Imaging systems, Metrology, Wafer-level optics, Reflectivity, Semiconducting wafers

Proceedings Article | 13 March 2018 Presentation + Paper
Proceedings Volume 10585, 105850N (2018) https://doi.org/10.1117/12.2297223
KEYWORDS: Acoustics, Extreme ultraviolet, Nanostructures, Diffraction, Coherence imaging, Nickel, Thin films, Wave propagation, Silicon, Nanostructuring

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10145, 101450L (2017) https://doi.org/10.1117/12.2271386
KEYWORDS: Diffraction, Sensors, Extreme ultraviolet, Reconstruction algorithms, Image resolution, Mirrors, Spatial resolution, Image transmission, Microscopes, Detection and tracking algorithms

Proceedings Article | 30 September 2016 Presentation + Paper
Proceedings Volume 9948, 99480U (2016) https://doi.org/10.1117/12.2236242
KEYWORDS: Coherence imaging, Image resolution, Diffraction, Sensors, Imaging systems, X-ray imaging, X-rays, Data acquisition, Microscopes, Extreme ultraviolet

Proceedings Article | 21 April 2016 Paper
Robert Karl, Charles Bevis, Raymond Lopez-Rios, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams
Proceedings Volume 9778, 97780F (2016) https://doi.org/10.1117/12.2220416
KEYWORDS: Polarization, Spectroscopy, Coherence imaging, Laser beam diagnostics, Deconvolution, Reconstruction algorithms, Metrology, Spatial filters, Diffraction gratings, Wave propagation

Proceedings Article | 21 April 2016 Paper
Proceedings Volume 9778, 97780J (2016) https://doi.org/10.1117/12.2220368
KEYWORDS: Extreme ultraviolet, Coherence imaging, Microscopy, Spectroscopy, High harmonic generation, Overlay metrology, Imaging spectroscopy, Mirrors, Interfaces

Showing 5 of 16 publications
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