Prof. Peter V. Nickles Profile

Prof. Peter V. Nickles

Dept Head at Gwangju Institute of Science and Technology

SPIE Involvement:

Author

Publications (35)

Proceedings Article | 30 September 2013 Paper

Prospects of ultrafast x-ray absorption investigations using laboratory based sources

Holger Stiel, Matthias Schnürer, Herbert Legall, Wolfgang Malzer, Lars Anklamm, Christopher Schlesiger, Karol Janulewicz, Mazhar Iqbal, Peter Nickles

Proceedings Volume 8849, 88490H (2013) https://doi.org/10.1117/12.2023906

KEYWORDS: X-rays, Crystals, X-ray sources, Absorption, Spectroscopy, Ultrafast phenomena, Pulsed laser operation, Plasma, Sensors, Electrons

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Proceedings Article | 7 May 2013 Paper

Secondary source generation using 30-fs, PW Ti:sapphire laser (PULSER)

T. Jeong, H. Kim, I. Kim, I. Choi, C. Kim, K. Pae, T. Yu, S. Lee, J. Sung, P. Nickles, J. Lee, C. Nam

Proceedings Volume 8780, 87801B (2013) https://doi.org/10.1117/12.2021198

KEYWORDS: Electrons, Pulsed laser operation, Sapphire lasers, Laser systems engineering, Mirrors, Femtosecond phenomena, Plasma, Amplifiers, Polymers, Ions

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Proceedings Article | 7 May 2013 Paper

Energetic negative ion and neutral atom beam generation at passage of laser accelerated high energy positive ions through a liquid spray

F. Abicht, R. Prasad, G. Priebe, J. Braenzel, L. Ehrentraut, A. Andreev, P. Nickles, M. Schnürer, V. Tikhonchuk, Sargis Ter-Avetisyan

Proceedings Volume 8779, 87790M (2013) https://doi.org/10.1117/12.2019505

KEYWORDS: Ions, Microchannel plates, Chemical species, Particles, Spectroscopy, Plasma, Oxygen, Pulsed laser operation, Liquids, Sensors

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Proceedings Article | 4 December 2012 Paper

Optical damage threshold and energy deposition in the embedded nanostructures

Karol Janulewicz, Hak Jae Lee, Asep Hapiddin, Bohuslav Matouš, Chul Min Kim, Dickson Joseph, K. Geckeler, Peter Nickles

Proceedings Volume 8530, 853006 (2012) https://doi.org/10.1117/12.977307

KEYWORDS: Absorption, Graphene, Sapphire, Proteins, Nanostructures, Carbon nanotubes, Coating, Laser damage threshold, Semiconducting wafers, Multilayers

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Proceedings Article | 20 May 2010 Paper

Extreme light infrastructure: laser architecture and major challenges

J.-P. Chambaret, O. Chekhlov, G. Cheriaux, J. Collier, R. Dabu, P. Dombi, A. Dunne, K. Ertel, P. Georges, J. Hebling, J. Hein, C. Hernandez-Gomez, C. Hooker, S. Karsch, G. Korn, F. Krausz, C. Le Blanc, Zs. Major, F. Mathieu, T. Metzger, G. Mourou, P. Nickles, K. Osvay, B. Rus, W. Sandner, G. Szabó, D. Ursescu, K. Varjú

Proceedings Volume 7721, 77211D (2010) https://doi.org/10.1117/12.854687

KEYWORDS: Optical amplifiers, Amplifiers, Laser applications, Crystals, Laser systems engineering, Semiconductor lasers, Laser development, Physics, Nuclear physics, Laser crystals

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Proceedings Article | 29 September 2009 Paper

X-ray laser takes the 100 Hz barrier

Holger Stiel, Johannes Tümmler, Robert Jung, Peter Nickles, Wolfgang Sandner

Proceedings Volume 7451, 745109 (2009) https://doi.org/10.1117/12.826317

KEYWORDS: Optical amplifiers, Picosecond phenomena, X-ray lasers, Imaging spectroscopy, Laser applications, Optical pumping, Pulsed laser operation, Laser systems engineering, Plasma, Disk lasers

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Proceedings Article | 12 October 2007 Paper

Full characterization of a GRIP Ni-like Ag amplifier for seeding with high harmonics at 13.9 nm

K. Janulewicz, J. Tuemmler, P. Nickles, H. Kim, I. Choi, N. Hafz, C. Kim, H. Kang, J. Sung, T. Yu, K. Hong, T. Jeong, J. Kim, Y.-C. Noh, D.-K. Ko, J. Lee

Proceedings Volume 6702, 67020A (2007) https://doi.org/10.1117/12.734012

KEYWORDS: X-ray lasers, Picosecond phenomena, Silver, Pulsed laser operation, Amplifiers, Near field, Neon, X-rays, Spatial coherence, Laser development

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Proceedings Article | 12 October 2005 Paper

X-ray lasers pumped by low-energy laser drivers

Karol Janulewicz, Johannes Tümmler, Gerd Priebe, Peter Nickles

Proceedings Volume 5958, 595813 (2005) https://doi.org/10.1117/12.623338

KEYWORDS: X-ray lasers, Plasma, Picosecond phenomena, Pulsed laser operation, Laser development, Ionization, Ions, Laser energy, Visible radiation, Electrons

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Proceedings Article | 14 September 2005 Paper

X-ray lasers driven by low-energy picosecond laser pulses

Karol Janulewicz, Johannes Tümmler, Gerd Priebe, Peter Nickles

Proceedings Volume 5919, 591906 (2005) https://doi.org/10.1117/12.616829

KEYWORDS: X-ray lasers, Plasma, Picosecond phenomena, Ionization, Pulsed laser operation, Electrons, Laser energy, Laser development, Ions, Amplifiers

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Proceedings Article | 12 September 2005 Paper

Elements of capillary optics applied in the spectral range between 10 and 15 nm

J. Tümmler, H. Stiel, H. Legall, R. Bruch, A. Bjeoumikhov, N. Langhoff, K. Janulewicz, G. Priebe, P. Nickles

Proceedings Volume 5919, 59190F (2005) https://doi.org/10.1117/12.617053

KEYWORDS: Beam splitters, Capillaries, Extreme ultraviolet, Optical components, Reflectivity, Plasma, Glasses, Charge-coupled devices, X-ray lasers, Zone plates

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Proceedings Article | 31 August 2005 Paper

Applications of highly oriented pyrolytic graphite (HOPG) for x-ray diagnostics and spectroscopy

Herbert Legall, Holger Stiel, Peter-Victor Nickles, Aniouar Bjeoumikhov, Norbert Langhoff, Michael Haschke, Vladimir Arkadiev, Reiner Wedell

Proceedings Volume 5918, 591802 (2005) https://doi.org/10.1117/12.614847

KEYWORDS: Crystals, X-rays, Spectrometers, Charge-coupled devices, Spectral resolution, Reflectivity, Sensors, Reflection, Copper, Absorption

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Proceedings Article | 19 December 2003 Paper

Status of MBI activities: Will a transient collisional x-ray laser with high repetition rate come soon?

Peter Nickles, Karol Janulewicz, Gerd Priebe, Antonio Lucianetti, Robert Kroemer, Anne-Kathrin Gerlitzke, Wolfgang Sandner

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.508780

KEYWORDS: X-ray lasers, Picosecond phenomena, Silver, Laser applications, Pulsed laser operation, Visibility, Plasma, Laser systems engineering, Surface finishing, Laser energy

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Proceedings Article | 19 December 2003 Paper

Output characteristics of a transient Ni-like Ag soft x-ray laser pumped by a single picosecond laser pulse

Karol Janulewicz, Gerd Priebe, Antonio Lucianetti, Robert Kroemer, Wolfgang Sandner, Robert King, Geoffrey Pert, Peter-Viktor Nickles

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.508779

KEYWORDS: Picosecond phenomena, X-ray lasers, Plasma, Silver, Ionization, Near field, Beam shaping, Ions, Signal processing, Physics

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Proceedings Article | 6 October 2003 Paper

X-ray lasers at MBI

Karol Janulewicz, Antonio Lucianetti, Gerd Priebe, Wolfgang Sandner, Peter-Viktor Nickles

Proceedings Volume 5230, (2003) https://doi.org/10.1117/12.532238

KEYWORDS: X-ray lasers, Plasma, Picosecond phenomena, Capillaries, Energy efficiency, Pulsed laser operation, Laser systems engineering, Laser applications, Palladium, Silver

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Proceedings Article | 16 June 2003 Paper

Characterization of a laser-produced plasma source for a laboratory EUV reflectometer

Frank Scholze, Frank Scholz, Johannes Tuemmler, Gerhard Ulm, Herbert Legall, Peter-Viktor Nickles, Wolfgang Sandner, Holger Stiel, Ludwig van Loyen

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482646

KEYWORDS: Extreme ultraviolet, Plasma, Spectroscopy, Mirrors, Pulsed laser operation, Reflectometry, Laser energy, Charge-coupled devices, Calibration, Power meters

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With the development of EUV lithography there is an increasing need for high-accuracy at-wavelength metrology. In particular, there is an urgent need for metrology at optical components like mirrors or masks close to the production line. Sources for metrology have to fit different demands on EUV power and spectral shape than sources for steppers systems. We present the results of the radiometric characterization of a laser produced plasma (LPP)-source, newly developed at Max-Born-Institute Berlin for use in an EUV reflectometer. It is operated with a high-power pointing-stabilized laser beam (energy per pulse up to 700 mJ, 10 ns pulse duration, < ± 25 μrad pointing stability) at 532 nm which is focussed on a rotating Au target cylinder. The incident angle of the laser beam is set to 63°, the detecting angle 55° to the target normal. The source has been characterized regarding spectral photon flux, source size and source point stability. Two independently calibrated instruments, an imaging spectrometer and a double multilayer tool for in-band power measurements were used to obtain highly reliable quantitative values for the EUV emission of the Au-LPP source. Both instruments were calibrated by Physikalisch-Technische Bundesanstalt in its radiometry laboratory at the electron storage ring BESSY II. We obtained a source size of 30 μm by 50 μm (2s horizontal by vertical) and a stability of better than 2s=5 μm horizontally and 2s=9 μm vertically. A spectral photon flux of 1*10e14 /(s sr 0.1 nm) at 13.4 nm at a laser pulse energy of 630 mJ is obtained. The shot-to-shot stability of the source is about 5% (1s) for laser pulse energies above 200 mJ. For pulse energies between 200 mJ and 700 mJ, there is a linear relation between laser pulse energy and EUV output. The spectrum shows a flat continuos emission in the EUV spectral range, which is important for wavelength scanning reflectometry. High stability in total flux and spectral shape of the plasma emission as well as low debris was only obtained using a new target position for each shot. There is also a trade off between source size and EUV power. For a slightly defocused laser, an increase in EUV power up to a factor of two is obtained, while the source size also increases by about a factor of two. It is shown that an Au-LPP source provides spectrally flat reproducible emission with sufficient power at low debris conditions for the operation of a laboratory based EUV reflectometer.

Proceedings Article | 2 June 2003 Paper

New laboratory EUV reflectometer for large optics using a laser plasma source

Ludwig van Loyen, Thomas Boettger, Stefan Braun, Hermann Mai, Andreas Leson, Frank Scholze, Johannes Tuemmler, Gerhard Ulm, Herbert Legall, Peter Nickles, Wolfgang Sandner, Holger Stiel, Christian Rempel, Mirko Schulze, Joerg Brutscher, Fritz Macco, Stefan Muellender

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485042

KEYWORDS: Extreme ultraviolet, Reflectivity, Sensors, Reflectometry, Beam splitters, Monochromators, EUV optics, Mirrors, Pulsed laser operation, Signal detection

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Proceedings Article | 23 October 2002 Paper

EUV-emission of xenon clusters excited by a high-repetition-rate burst-mode laser

Holger Stiel, Ulrich Vogt, Sargis Ter-Avetisyan, Matthias Schnurer, Ingo Will, Peter Nickles

Proceedings Volume 4781, (2002) https://doi.org/10.1117/12.450965

KEYWORDS: Pulsed laser operation, Picosecond phenomena, X-rays, Xenon, Plasma, Extreme ultraviolet lithography, Extreme ultraviolet, Absorption, Photodiodes, Spectrographs

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Proceedings Article | 12 December 2001 Paper

X-ray laser progress for applications

David Ros, Gerard Jamelot, Mustapha Boussoukaya, Antoine Carillon, Pierre Jaegle, Annie Klisnick, P. Fourcade, S. Hubert, Jaroslav Kuba, Raymond Smith, Sebastien Le Pape, Philippe Zeitoun, Bedrich Rus, Tomas Mocek, M. Kozlova, A. Praeg, Denis Joyeux, Daniel Phalippou, H. Safa, C. Kalykow, F. Ballester, E. Petit, Claude Chenais-Popovics, Stephane Sebban, R. Haroutunian, Philippe Balcou, Hiroyuki Daido, Huajing Tang, Ciaran Lewis, R. Keenan, R. M. O'Rourke, S. Topping, Andrew MacPhee, Peter Nickles, Karol Janulewicz, Fulvia Bortolotto, Geoffrey Pert, Gregory Tallents, F. Strati

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450593

KEYWORDS: X-ray lasers, Mirrors, Plasma, Picosecond phenomena, Interferometry, Extreme ultraviolet, Interferometers, Ions, Silver, Spectroscopy

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Proceedings Article | 12 December 2001 Paper

Temporal and far-field characterization of the transient Ni-like Ag x-ray laser under traveling-wave irradiation

Annie Klisnick, Jaroslav Kuba, David Ros, Antoine Carillon, Gerard Jamelot, Raymond Smith, Federico Strati, Gregory Tallents, R. Keenan, S. Topping, Ciaran Lewis, Peter Nickles, Karol Janulewicz, Fulvia Bortolotto, David Neely, R. Clarke, J. Collier, Andrew MacPhee, Claude Chenais-Popovics, Jean-Christophe Chanteloup, Denis Joyeux, Daniel Phalippou, Hiroyuki Daido, Huajing Tang

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450576

KEYWORDS: Picosecond phenomena, X-ray lasers, Plasma, Silver, Mirrors, Spectroscopy, Pulsed laser operation, Streak cameras, Diagnostics, Charge-coupled devices

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Proceedings Article | 12 December 2001 Paper

X-ray laser spectroscopy on lithium-like ions

Paul Neumayer, J. Alvarez, Bruno Becker-de Mos, Stefan Borneis, K. Brueck, Erhard Gaul, C. Haefner, Karol Janulewicz, Thomas Kuehl, Dieter Marx, Irene Reinhard, Marco Tomaselli, Peter Nickles, Wolfgang Sandner, Wolfgang Seelig

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450596

KEYWORDS: Ions, X-ray lasers, Mirrors, Laser spectroscopy, Spectroscopy, Laser systems engineering, Pulsed laser operation, Diffraction gratings, Ray tracing, Data modeling

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Proceedings Article | 12 December 2001 Paper

Ablative capillary discharge plasma as a preformed medium for soft x-ray laser

Karol Janulewicz, Jorge Rocca, Antonio Lucianetti, Fulvia Bortolotto, Nadiezhda Bobrova, Pavel Sasorov, Wolfgang Sandner, Peter Nickles

Proceedings Volume 4505, (2001) https://doi.org/10.1117/12.450585

KEYWORDS: Plasma, Capillaries, Ionization, Sulfur, Resistance, Absorption, Pulsed laser operation, Numerical simulations, Picosecond phenomena, X-ray lasers

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Proceedings Article | 14 November 2001 Paper

Absolute EUV yield of laser-irradiated Xe-clusters dependent on pulse width

Peter Nickles, Matthias Schnuerer, Holger Stiel, Ulrich Vogt, Sarkis Ter-Avetisyan, Wolfgang Sandner

Proceedings Volume 4504, (2001) https://doi.org/10.1117/12.448455

KEYWORDS: Xenon, Picosecond phenomena, Plasma, Pulsed laser operation, Absorption, Extreme ultraviolet, Spectroscopy, Ionization, Laser applications, Laser energy

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Proceedings Article | 20 August 2001 Paper

Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

Ulrich Vogt, Holger Stiel, Ingo Will, Marek Wieland, Thomas Wilhein, Peter Nickles, Wolfgang Sandner

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436685

KEYWORDS: Pulsed laser operation, Extreme ultraviolet lithography, Liquids, Plasma, Laser stabilization, Extreme ultraviolet, Laser systems engineering, Oxygen, Laser development, Spectrographs

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Proceedings Article | 23 April 2001 Open Access

PHELIX: a petawatt high-energy laser for heavy ion experiments

M. Roth, Bruno Becker-de Mos, R. Bock, Stefan Borneis, Herbert Brandt, C. Bruske, John Caird, E. Dewald, C. Haefner, D. Hoffmann, Mikhail Kalachnikov, H.-J. Kluge, Ferenc Krausz, Thomas Kuehl, Grant Logan, Dieter Marx, Paul Neumayer, Peter Nickles, M. Perry, K. Poppensieker, Irene Reinhard, Wolfgang Sandner, Roland Sauerbrey, A. Tauschwitz, Ingo Will

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425559

KEYWORDS: Ions, Plasma, Pulsed laser operation, Fusion energy, Ion beams, Optical amplifiers, Laser systems engineering, Laser energy, Ion lasers, Laser development

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Proceedings Article | 23 April 2001 Paper

Line x-ray emission from Al targets irradiated by high-intensity variable-length laser pulses

Jiri Limpouch, Oldrich Renner, E. Krousky, Ingo Uschmann, Eckhart Foerster, Mikhail Kalachnikov, Peter Nickles

Proceedings Volume 4424, (2001) https://doi.org/10.1117/12.425555

KEYWORDS: X-rays, Picosecond phenomena, Pulsed laser operation, Plasmas, Aluminum, Optical simulations, Absorption, Laser energy, Calibration, Spectral calibration

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Proceedings Article | 8 November 2000 Paper

Extreme-ultraviolet source development: a comparison of different concepts

Guido Schriever, Manfred Rahe, Ulrich Rebhan, Dirk Basting, Wojciech Walecki, Hans Lauth, Rainer Lebert, Klaus Bergmann, Dieter Hoffmann, Oliver Rosier, Willi Neff, Reinhart Poprawe, Roland Sauerbrey, H. Schwoerer, S. Duesterer, C. Ziener, Peter Nickles, H. Stiehl, Ingo Will, Wolfgang Sandner, Guenther Schmahl, Dietbert Rudolph

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406662

KEYWORDS: Extreme ultraviolet, Laser applications, Plasma, Pulsed laser operation, Metrology, Laser systems engineering, Spectrographs, Laser development, High power lasers, Prototyping

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Proceedings Article | 21 October 1999 Paper

Sulfur capillary discharge irradiated by a picosecond-laser pulse: a new way toward tabletop x-ray laser

Karol Janulewicz, Fulvia Bortolotto, P. Warwick, Mikhail Kalachnikov, Vyacheslav Shlyaptsev, Wolfgang Sandner, Jorge Rocca, Peter Nickles

Proceedings Volume 3776, (1999) https://doi.org/10.1117/12.366685

KEYWORDS: Capillaries, Plasma, Pulsed laser operation, Sulfur, Picosecond phenomena, X-ray lasers, Beam shaping, Sensors, Spectrographs, Optical filters

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Proceedings Article | 23 July 1999 Paper

High-energy laser system for HIF research at GSI

M. Roth, R. Bock, U. Funk, Matthias Geissel, D. Hoffmann, Thomas Kuehl, Grant Logan, Jurgen Meyer-ter-Vehn, Peter Nickles, Michael Perry, Wolfgang Seelig, Christian Stoeckl, S. Stoewe, W. Suess

Proceedings Volume 3492, (1999) https://doi.org/10.1117/12.354205

KEYWORDS: Plasma, Fusion energy, Ions, Laser systems engineering, Ion beams, Plasma generation, Amplifiers, Laser energy, Lead, Plasma physics

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Proceedings Article | 5 March 1999 Paper

Terawatt femtosecond laser pulse temporal shaping using double-stage nonlinear optical conversion

M. Dzhidzhoev, Vyacheslav Gordienko, Mikhail Kalachnikov, P. Mikheev, Peter Nickles, A. Podshivalov, V. Pryalkin, Andrey Savel'ev

Proceedings Volume 3735, (1999) https://doi.org/10.1117/12.341464

KEYWORDS: Pulsed laser operation, Raman spectroscopy, Femtosecond phenomena, Nonlinear optics, Raman scattering, Crystals, Laser scattering, Second-harmonic generation, Energy efficiency, Physical phenomena

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Proceedings Article | 1 November 1997 Paper

X-ray laser enhancement with multi-pulsing

Gregory Tallents, J. Lin, A. Demir, A. Behjat, Raymond Smith, Jie Zhang, E. Wolfrum, Justin Wark, Michael Key, Ciaran Lewis, Andrew MacPhee, S. McCabe, P. Warwick, David Neely, S. Healey, Geoffrey Pert, Peter Nickles, Mikhail Kalachnikov, Matthias Schnuerer

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.279413

KEYWORDS: X-ray lasers, Picosecond phenomena, Germanium, Plasma, Ray tracing, X-rays, Absorption, Optical simulations, Spectroscopy, Pulsed laser operation

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Proceedings Article | 1 November 1997 Paper

Transient inversion XUV-lasers in Ti and Ge

Peter Nickles, Matthias Schnuerer, Mikhail Kalachnikov, Wolfgang Sandner, Vyacheslav Shlyaptsev, Colin Danson, David Neely, E. Wolfrum, Jie Zhang, A. Behjat, A. Demir, Gregory Tallents, P. Warwick, Ciaran Lewis

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.279405

KEYWORDS: Titanium, Germanium, X-ray lasers, Plasma, Picosecond phenomena, X-rays, Ions, Spectroscopy, CCD cameras, Pulsed laser operation

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Proceedings Article | 1 November 1997 Paper

Modeling of table-top transient and capillary inversion x-ray lasers

Vyacheslav Shlyaptsev, Jorge Rocca, Mikhail Kalachnikov, Peter Nickles, Wolfgang Sandner, Albert Osterheld, James Dunn, David Eder

Proceedings Volume 3156, (1997) https://doi.org/10.1117/12.293379

KEYWORDS: Plasma, X-ray lasers, Capillaries, Titanium, Picosecond phenomena, Ions, Refraction, X-rays, Ionization, Pulsed laser operation

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Proceedings Article | 25 September 1995 Paper

Efficient short-pulse XUV laser on Ne-like titanium

Peter Nickles, Matthias Schnuerer, Mikhail Kalachnikov, Ingo Will, Wolfgang Sandner, Vyacheslav Shlyaptsev

Proceedings Volume 2520, (1995) https://doi.org/10.1117/12.221656

KEYWORDS: Plasma, Extreme ultraviolet, Titanium, Pulsed laser operation, Picosecond phenomena, Spectrographs, X-ray lasers, Tellurium, Ionization, Mirrors

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