A single optical system with features of both automatic calibration and multiple configurations has been developed for high-resolution wavefront measurements. With the configuration of fine measurements, the tester can scan a large area to obtain mapping data with detailed local wavefront information of the sample. The tester can also take a fast snapshot of wavefront measurement by using the configuration of coarse measurements.
Existing position sensors have limitations such as single function, limited range, slow speed, and low resolution. Emerging applications need sensors that work in variable and unpredictable environments with multiple dimensions. The proposed system offers advantages that outweigh these existing sensors. It has a unique design that combines optical imaging and laser techniques to provide a full capability of 6-dimensional sensing with only one sensor system, covering a wide range for both near and far fields with both high spatial and angular resolutions. The sensor can also easily extend its capability by modifying optics and laser or exploiting new optical components. In addition to the above six degrees of freedom, the sensor has potential to detect additional information such as the speed and acceleration of the target for both linear translation and rotation, by simply record the time lapse between events. Therefore, our technique has broad potential applications. It can also facilitate technical advances in metrology, biomedicine, and scientific research.
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