Lenses for use in the infrared (IR) wavelength region are key elements of IR image sensors, and determine the cost and performance of such sensors. As an alternative to a conventional lens, we designed and fabricated a silicon-based metalens in order to realize a compact, high-performance IR focal plane array (IRFPA) system. The metalens was developed using an automatic inverse design technique based on a rigorous coupled wavelength analysis. It consisted of a periodic array of pillars fabricated by deep reactive-ion etching of a silicon wafer. This metalens was designed for the 80×60 IRFPA used in the Mitsubishi Electric Corporation MIR8060B1, which comprises an array of pn-junction diodes formed on a silicon-on-insulator layer. It is expected that this metalens-based IR sensor will expand the range of applications of such sensors.
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