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Tomas Manzaneque-Garcia
at Univ de Castilla-La Mancha
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Publications (1)
Proceedings Article | 19 May 2009 Paper
Analysis of the quality factor of piezoelectric-actuated micro-resonators
T. Manzaneque, J. Hernando, J. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J. Sánchez-Rojas
Proceedings Volume 7362, 73620A (2009) https://doi.org/10.1117/12.821651
KEYWORDS: Bridges, Silicon, Electrodes, Aluminum nitride, Finite element methods, Microresonators, Sensors, Vibrometry, Resonators, Microelectromechanical systems
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