KEYWORDS: Etching, Microsystems, Microelectromechanical systems, TCAD, Computer aided design, 3D modeling, Device simulation, Data modeling, Process modeling, Microopto electromechanical systems
In this paper we present a TCAD tool for MEMS, which combines process and layout design and provides links to behavioral
modeling tools as well as to specialized modules for the optimized design of single components. There is a large
amount of new fabrication technologies available which make the design of highly innovative MEMS and MOEMS
possible. The design of such systems not only incorporates the layout of masks but also involves the composition of a
flawless process chain. TCAD tools for MEMS available today do mostly not support the design of new fabrication
processes together with behavioral simulation and layout design. Therefore, there is a need for a methodical approach to
component-design, which leads an engineer from single components to a system ready for fabrication. Based on a conceptual
model for the design process the latest version of the modular software environment BICEP3S (Braunschweigs Integrated CAD-Environment for Product Planning Process Simulation) is explained. The concept and data model of
building blocks on component level, that act as knowledge containers for fabrication ready functional elements of microsystems,
are shown in detail. As the detailed simulation of single process steps is crucial in fabrication oriented design
cycles, we present an atomistic etch-simulator as one example for specialized simulation modules of our design environment.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.