Mr. Yongsheng Shu Profile

Yongsheng Shu

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Publications (2)

Proceedings Article | 5 May 2005 Paper

Full chip gate CD error prediction for model-based OPC

Vincent Yongsheng Shu, Byoung Il Choi, Shyue-Fong Quek

Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.599253

KEYWORDS: Optical proximity correction, Model-based design, Critical dimension metrology, Error analysis, Algorithm development, Visualization, Resolution enhancement technologies, Lithography, Photomasks, Semiconducting wafers

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Proceedings Article | 20 March 1997 Paper

Surveying dynamic deformation of rotating propellar in water tunnel

Ya Yue, En Qi, Pin Hsu, Xiaoping Wu, Yong Shu

Proceedings Volume 2921, (1997) https://doi.org/10.1117/12.269786

KEYWORDS: Water, Charge-coupled devices, Reflectors, Glasses, Computing systems, Image processing, Refractive index, CCD image sensors, Motion detection, Motion models

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