Ms. Xiuhong Wei Profile

Xiuhong Wei

at Technische Univ Delft

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Publications (2)

Proceedings Article | 12 May 2005 Paper

Influence of mask induced polarization effects on a pattern printability

Yuri Aksenov, Peter Dirksen, Xiuhong Wei, Peter Zandbergen

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.597438

KEYWORDS: Diffraction, Photomasks, Polarization, Chromium, Binary data, Semiconducting wafers, Critical dimension metrology, Reticles, Optical proximity correction, Near field

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Proceedings Article | 12 May 2005 Paper

Three-dimensional rigorous simulation of mask-induced polarization

Xiuhong Wei, H. Urbach, Arthur Wachters, Yuri Aksenov

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.597732

KEYWORDS: Chromium, Photomasks, 3D modeling, Polarization, Binary data, Dielectric polarization, Finite element methods, Magnetism, Mathematical modeling, Maxwell's equations

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