Ms. Mingyue Xu Profile

Mingyue Xu

at Univ of Shanghai for Science and Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 27 November 2023 Poster + Paper

Novel parallel measurement method of spectral confocal sensor with multi-point scanning

Mingyue Xu, Shijie Liu, Sen Han, Shenghao Wang

Proceedings Volume 12769, 127691K (2023) https://doi.org/10.1117/12.2686955

KEYWORDS: Confocal microscopy, Objectives, Chromatic aberrations, Light sources, Sensors, Lenses, Design and modelling, Imaging spectroscopy, Simulations, Monochromatic aberrations

Read Abstract +

Spectral confocal technology has widespread applications in the field of surface topography measurement. However, conventional spectral confocal sensors are limited to acquiring height information for one point at a time during the measurement process. Consequently, the need for point-by-point scanning compromises the efficiency of existing methodologies. To address this challenge, we propose a novel measurement method utilizing a Nipkow disk and spectral imaging technology. This innovative approach enables simultaneous acquisition of height information for multiple points. In this paper, a dispersive objective lens is designed by using Zemax OpticStudio optical design software, specifically tailored for simultaneous multi-point measurements. The dispersive lens group consists of five single lenses and one double cemented lens, working within the wavelength range of 450nm to 720nm. The dispersion range can reach 450μm, with a dispersion linearity coefficient of 0.998. The accuracy of the dispersive objective lens for multi-point measurement is validated through non-sequential mode simulations in Zemax OpticStudio. The results demonstrate a measurement linearity of 0.998 for each individual measurement point. This simulation experiment provides theoretical foundations and guidance for subsequent experimental endeavors.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years