Dr. Guoliang Chen Profile

Dr. Guoliang Chen

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SPIE Journal Paper | 18 March 2016

Periodic photonic filters: theory and experiment

Guoliang Chen, Kyu Jin Lee, Robert Magnusson

OE, Vol. 55, Issue 03, 037108, (March 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.3.037108

KEYWORDS: Optical filters, Silicon, Semiconducting wafers, Waveguides, Reflection, Polarization, Antireflective coatings, Optical engineering, Diffraction gratings, Resonators

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Photonic multiline filters exhibiting periodic resonance lines on a dense spectral grid in a broad wavelength range are demonstrated. We design the filters using rigorous numerical methods and then proceed with experimental verification by patterning, etching, and collecting spectral data. We use standard double-side-polished 300-μm-thick silicon wafers for the experiments. On one side of the wafer, we place a shallow grating whereas the other side has a quarter-wave antireflection layer. An example filter with a ∼200-nm-deep TiO2 grating on the wafer yields 12 narrow resonance peaks within a 10-nm wavelength range centered at 1550 nm. The spectral width of each filter peak is ∼0.1 nm with a free spectral range of ∼0.8 nm. Peak efficiency approaches 80% with low sidebands between the resonant filter lines. We discuss briefly design of polarization-independent periodic filters and the concept of Brewster-angle filters. Possible applications include spectral sampling and wavelength discretization as used, e.g., in sensing gas species and quantifying toxic gas concentrations.

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