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Chloé Bordas
at Ctr National de la Recherche Scientifique
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Publications (2)
Proceedings Article | 17 May 2007 Paper
Germanium as an integrated resistor material in RF MEMS switches
K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac, D. Dubuc
Proceedings Volume 6589, 65890X (2007) https://doi.org/10.1117/12.722039
KEYWORDS: Germanium, Microelectromechanical systems, Resistors, Etching, Capacitors, Switches, Silicon, Bridges, Gold, Dielectrics
Proceedings Article | 15 May 2007 Paper
Temperature stress impact on power RF MEMS switches
Chloé Bordas, Katia Grenier, David Dubuc, Mathieu Paillard, Jean-Louis Cazaux, Robert Plana
Proceedings Volume 6589, 65890V (2007) https://doi.org/10.1117/12.722010
KEYWORDS: Switches, Microelectromechanical systems, Bridges, Temperature metrology, Electrodes, Silicon, Gold, Dielectrics, Telecommunications, Failure analysis
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