CONFERENCE PROCEEDINGS
Advanced Search
Guo-Wei Wu
at National Taiwan University
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 24 May 2022 Presentation + Paper
New critical dimension optical metrology for submicron high-aspect-ratio structures using spectral reflectometry with supercontinuum laser illumination
Proceedings Volume 12137, 121370E (2022) https://doi.org/10.1117/12.2621895
KEYWORDS: Reflectometry, Spectroscopy, Scanning electron microscopy, Laser metrology, Image processing, Optical metrology, Etching, Critical dimension metrology, Objectives, Laser sources
Proceedings Article | 20 May 2022 Presentation + Paper
Accuracy-enhanced diffraction image profilometry using foreign aberration for resolving image ambiguity
Proceedings Volume 12137, 121370M (2022) https://doi.org/10.1117/12.2621901
KEYWORDS: Error analysis, Diffraction, Calibration, Microscopy, Artificial neural networks
Proceedings Article | 3 September 2019 Paper
Investigation and mapping strategy on influence of surface tilting in diffractive pattern correlation profilometry
Proceedings Volume 11102, 111021K (2019) https://doi.org/10.1117/12.2528982
KEYWORDS: Diffraction, Digital image correlation, Databases, Image processing, Algorithm development, Image sensors, Mirrors, Associative arrays, Objectives, Image analysis
Proceedings Article | 3 September 2019 Presentation + Paper
Precise microscopic profilometry using diffractive image correlation and theoretical model simulation
Proceedings Volume 11102, 111020A (2019) https://doi.org/10.1117/12.2528597
KEYWORDS: Diffraction, Image sensors, Databases, Digital micromirror devices, Confocal microscopy, Light sources, Monochromatic aberrations, 3D image reconstruction, Data hiding, 3D image processing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top