Dr. Mikko Utriainen Profile

Dr. Mikko Utriainen

at Chipmetrics Oy

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Author

Publications (1)

Proceedings Article | 5 March 2022 Presentation + Paper

Mikko Utriainen, Kimmo Saastamoinen, Heikki Rekola, Oili M. Ylivaara, Riikka Puurunen, Pasi Hyttinen

Proceedings Volume 12008, 120080D (2022) https://doi.org/10.1117/12.2609643

KEYWORDS: Semiconducting wafers, Atomic layer deposition, Thin films, Silicon, 3D metrology, Microscopes, Image analysis, Optical metrology

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Keywords/Phrases